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Pressure sensor error?

May 01, 2023

Pressure sensor error?

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Firstly, offset error: As the vertical offset of the pressure sensor remains constant throughout the entire pressure range, changes in the diffusion of the converter and laser adjustment correction will result in offset error.

Secondly, there is sensitivity error: the magnitude of the error generated is proportional to the pressure. If the sensitivity of the device is higher than the typical value, the sensitivity error will be an increasing function of pressure. If the sensitivity is lower than the typical value, the sensitivity error will be a decreasing function of pressure. The reason for this error is due to changes in the diffusion process.

The third is linear error: this is a factor that has a small impact on the initial error of pressure sensors. The reason for this error is the physical nonlinearity of the silicon wafer, but for sensors with amplifiers, the nonlinearity of the amplifier should also be included. The linear error curve can be a concave curve or a convex curve for weighing sensors.

Finally, there is hysteresis error: In most cases, the hysteresis error of pressure sensors can be completely ignored because silicon wafers have high mechanical stiffness. Generally, hysteresis error only needs to be considered in situations where the pressure changes significantly.

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